CSI

Online Monitoring System

•  
• Continuous Chemical Sampling Inspection (CSI ) is a system that monitors ultra trace level of metallic impurities in chemicals used in semicondutor industries.
• In order to avoid any contamination risk in chemicals, CSI has been used to monitor metallic impurities in different storage tanks by one ICP-MS sequentially for 24-7. When a lorry comes, a sample from lorry is analyzed right after the current sample.
•